

High throughput speed,
Develop and install motion control techniques which provide high accuracy.
Successfully control pattern deformation rate under 0.005%,
This R&D finish on January 2013, and commercialize on February





High throughput speed,
Develop and install motion control techniques which provide high accuracy.
Successfully control pattern deformation rate under 0.005%,
This R&D finish on January 2013, and commercialize on February